Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/Book
http://schema.org/CreativeWork

http://schema.org/about

http://id.loc.gov/authorities/subjects/sh2008104738
http://id.loc.gov/authorities/subjects/sh85103070
http://id.loc.gov/authorities/subjects/sh86002692
http://experiment.worldcat.org/entity/work/data/791889581#Topic/metallisation_congres
http://id.loc.gov/authorities/subjects/sh2009123345
http://id.worldcat.org/fast/975545
http://id.loc.gov/authorities/subjects/sh2010106195
http://experiment.worldcat.org/entity/work/data/791889581#Topic/circuits_integres_conception_et_construction_congres
http://experiment.worldcat.org/entity/work/data/791889581#Topic/gravure_par_plasma_congres
http://id.worldcat.org/fast/893109
http://id.worldcat.org/fast/1017914
http://id.worldcat.org/fast/1066327
http://id.worldcat.org/fast/1019757
http://experiment.worldcat.org/entity/work/data/791889581#Topic/couches_dielectriques_congres
http://id.loc.gov/authorities/subjects/sh85067118
http://id.loc.gov/authorities/subjects/sh85067117
http://id.loc.gov/authorities/subjects/sh85037783
http://id.worldcat.org/fast/975535
http://id.loc.gov/authorities/subjects/sh2010101549
http://id.loc.gov/authorities/subjects/sh2008107752

http://schema.org/contributor

http://experiment.worldcat.org/entity/work/data/791889581#Organization/society_of_photo_optical_instrumentation_engineers_united_states
http://experiment.worldcat.org/entity/work/data/791889581#Organization/society_of_photo_optical_instrumentation_engineers_u_s
http://experiment.worldcat.org/entity/work/data/791889581#Meeting/microelectronics_technology_and_process_integration_1994_austin_tx
http://worldcat.org/entity/person/id/2640245966
http://experiment.worldcat.org/entity/work/data/791889581#Meeting/spie_s_international_microelectronic_manufacturing_symposium_1994_austin_tx
http://experiment.worldcat.org/entity/work/data/791889581#Meeting/international_microelectronic_manufacturing_symposium_1994_10_20_21_austin_tex
http://worldcat.org/entity/person/id/2635253455
http://experiment.worldcat.org/entity/work/data/791889581#Meeting/microelectronics_technology_and_process_integration_1994_austin_tex
http://experiment.worldcat.org/entity/work/data/791889581#Organization/spie_digital_library
http://viaf.org/viaf/167606997
http://viaf.org/viaf/147402443
http://experiment.worldcat.org/entity/work/data/791889581#Meeting/spie_s_international_microelectronic_manufacturing_symposium_1994_austin_tex

http://schema.org/genre

"Conference papers and proceedings"
"Conference papers and proceedings"@en

http://schema.org/name

"Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas"
"Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas"@en
"Microelectronics technology and process integration : proceedings : 20-21 October 1994, Austin, Texas"@en
"Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas ; [conference held as part of SPIE's International Microelectronic Manufacturing '94 Symposium]"
"Microelectronics technology and process integration 20-21 October 1994, Austin, Texas"@en
"Microelectronics technology and process integration 20-21 October 1994, Austin, Texas"

http://schema.org/workExample

http://www.worldcat.org/oclc/636721146
http://www.worldcat.org/oclc/624400939
http://www.worldcat.org/oclc/840280561
http://www.worldcat.org/oclc/31210232
http://www.worldcat.org/oclc/849936107
http://www.worldcat.org/oclc/759720737
http://www.worldcat.org/oclc/637628504
http://www.worldcat.org/oclc/58411109
http://www.worldcat.org/oclc/436976167
http://www.worldcat.org/oclc/257916039
http://www.worldcat.org/oclc/841357615
http://www.worldcat.org/oclc/858892925

International Microelectronic Manufacturing Symposium (1994.10.20-21 Austin, Tex.)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"International Microelectronic Manufacturing Symposium (1994.10.20-21 Austin, Tex.)"

http://experiment.worldcat.org/entity/work/data/791889581#Meeting/international_microelectronic_manufacturing_symposium_1994_10_20_21_austin_tex

Microelectronics Technology and Process Integration (1994 ; Austin, Tex.)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microelectronics Technology and Process Integration (1994 ; Austin, Tex.)"

http://experiment.worldcat.org/entity/work/data/791889581#Meeting/microelectronics_technology_and_process_integration_1994_austin_tex

Microelectronics Technology and Process Integration (1994 ; Austin, TX)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microelectronics Technology and Process Integration (1994 ; Austin, TX)"

http://experiment.worldcat.org/entity/work/data/791889581#Meeting/microelectronics_technology_and_process_integration_1994_austin_tx

SPIE's International Microelectronic Manufacturing Symposium (1994 ; Austin, Tex.)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"SPIE's International Microelectronic Manufacturing Symposium (1994 ; Austin, Tex.)"

http://experiment.worldcat.org/entity/work/data/791889581#Meeting/spie_s_international_microelectronic_manufacturing_symposium_1994_austin_tex

SPIE's International Microelectronic Manufacturing Symposium (1994 ; Austin, TX)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"SPIE's International Microelectronic Manufacturing Symposium (1994 ; Austin, TX)"

http://experiment.worldcat.org/entity/work/data/791889581#Meeting/spie_s_international_microelectronic_manufacturing_symposium_1994_austin_tx

Society of Photo-optical Instrumentation Engineers (U.S.)

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (U.S.)"

http://experiment.worldcat.org/entity/work/data/791889581#Organization/society_of_photo_optical_instrumentation_engineers_u_s

Society of Photo-optical Instrumentation Engineers (United States)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (United States)"

http://experiment.worldcat.org/entity/work/data/791889581#Organization/society_of_photo_optical_instrumentation_engineers_united_states

SPIE Digital Library.

rdf:type
http://schema.org/Organization
schema:name
"SPIE Digital Library."

http://experiment.worldcat.org/entity/work/data/791889581#Organization/spie_digital_library

Circuits intégrés Conception et construction Congrès.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Conception et construction Congrès."

http://experiment.worldcat.org/entity/work/data/791889581#Topic/circuits_integres_conception_et_construction_congres

Couches diélectriques Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Couches diélectriques Congrès."

http://experiment.worldcat.org/entity/work/data/791889581#Topic/couches_dielectriques_congres

Gravure par plasma Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Gravure par plasma Congrès."

http://experiment.worldcat.org/entity/work/data/791889581#Topic/gravure_par_plasma_congres

Métallisation Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Métallisation Congrès."