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Nanoscale calibration standards and methods dimensional and related measurements in the micro- and nanometer range

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on.

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  • "Nanoscale calibration"

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  • "The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on."@en
  • "The quantitative determination of the properties of micro- and nanostructures is essential in research and development. Here, peer-reviewed papers are presented with contributions for the NanoScale 2004 seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany in March 2004. Topics include problems of quantitative measurement as well as methods of calibration, correction and instrumentation. The seminar stimulates the exchange of information between users in science and industry and manufacturers of the relevant hard- and software."

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  • "Electronic books"@en
  • "Conference papers and proceedings"@en
  • "Conference papers and proceedings"
  • "Aufsatzsammlung"

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  • "Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range ; [peer-reviewed papers are presented with contributions to the NanoScale 2004 Seminar at the Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany, in March 2004]"
  • "Nanoscale calibration standards and methods dimensional and related measurements in the micro- and nanometer range"@en
  • "Nanoscale calibration standards and methods dimensional and related measurements in the micro- and nanometer range"
  • "Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range"

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