Linked Data Explorerhttp://worldcat.org/entity/work/id/815078765
Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties
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http://schema.org/about
- http://id.worldcat.org/fast/976051
- http://id.loc.gov/authorities/subjects/sh85084822
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/interconnects_integrated_circuit_technology
- http://id.worldcat.org/fast/1019771
- http://id.worldcat.org/fast/1071907
- http://id.loc.gov/authorities/subjects/sh2002000566
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/dielectric_films
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/porous_materials
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/electronic_books
- http://id.loc.gov/authorities/subjects/sh85037783
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/technology_&_engineering_electronics_microelectronics
- http://id.worldcat.org/fast/893109
- http://id.loc.gov/authorities/subjects/sh85105018
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/microelectronics_materials
- http://experiment.worldcat.org/entity/work/data/815078765#Topic/technology_&_engineering_electronics_digital
http://schema.org/genre
- "Livres électroniques"
- "Electronic books"@en
http://schema.org/name
- "Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties"
- "Low-k nanoporous interdielectrics materials, thin film fabrications, structures and properties"@en
- "Low-k nanoporous interdielectrics : materials, thin film fabrications, structures and properties"