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Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications
This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.
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- "This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes."@en
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- "Electronic books"@en
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- "Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications"@en