Materials modification by energetic atoms and ions symposium held April 28-30, 1992, San Francisco, California, USA

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/Book
http://schema.org/CreativeWork

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/28744343#Topic/films_sottili_san_francisco_calif_1992
http://experiment.worldcat.org/entity/work/data/28744343#Topic/plasmaatzen
http://experiment.worldcat.org/entity/work/data/28744343#Topic/couches_minces_congres
http://id.loc.gov/authorities/subjects/sh2010112588
http://experiment.worldcat.org/entity/work/data/28744343#Topic/semiconducteurs_congres
http://experiment.worldcat.org/entity/work/data/28744343#Place/san_francisco_&lt_calif_1992&gt
http://id.worldcat.org/fast/1066327
http://experiment.worldcat.org/entity/work/data/28744343#Topic/ion_bombardment
http://experiment.worldcat.org/entity/work/data/28744343#Topic/thin_films
http://id.worldcat.org/fast/1112219
http://experiment.worldcat.org/entity/work/data/28744343#Topic/atzen
http://experiment.worldcat.org/entity/work/data/28744343#Topic/bombardement_ionique_congres
http://experiment.worldcat.org/entity/work/data/28744343#Topic/ionenstrahl
http://experiment.worldcat.org/entity/work/data/28744343#Topic/oberflachenbehandlung
http://experiment.worldcat.org/entity/work/data/28744343#Topic/gravure_par_plasma_congres
http://id.loc.gov/authorities/subjects/sh2008104908
http://experiment.worldcat.org/entity/work/data/28744343#Place/san_francisco_calif_1992
http://experiment.worldcat.org/entity/work/data/28744343#Topic/semiconduttori_tecnologia_congressi_1992
http://id.worldcat.org/fast/1150018
http://experiment.worldcat.org/entity/work/data/28744343#Topic/halbleiter
http://id.loc.gov/authorities/subjects/sh2008112885
http://id.worldcat.org/fast/978567
http://experiment.worldcat.org/entity/work/data/28744343#Topic/dunnschichttechnik
http://experiment.worldcat.org/entity/work/data/28744343#Topic/plasma_etching
http://experiment.worldcat.org/entity/work/data/28744343#Topic/semiconductors
http://experiment.worldcat.org/entity/work/data/28744343#Topic/heteroepitaxie
http://id.loc.gov/authorities/subjects/sh2010106195
http://experiment.worldcat.org/entity/work/data/28744343#Topic/bombardamento_ionico_congressi_1992

http://schema.org/contributor

http://worldcat.org/entity/person/id/2671137880
http://worldcat.org/entity/person/id/2690445858
http://experiment.worldcat.org/entity/work/data/28744343#Meeting/symposium_k_materials_modifications_by_energetic_atoms_and_ions_1992_san_francisco_calif
http://worldcat.org/entity/person/id/2630923297
http://experiment.worldcat.org/entity/work/data/28744343#Meeting/materials_research_society_1992_san_francisco_calif_symposium_k

http://schema.org/creator

http://experiment.worldcat.org/entity/work/data/28744343#Meeting/symposium_k_materials_modifications_by_energetic_atoms_and_ions_1992_san_francisco_calif

http://schema.org/editor

http://worldcat.org/entity/person/id/2630923297

http://schema.org/genre

"Kongreß"
"Conference papers and proceedings"
"Conference papers and proceedings"@en
"San Francisco (Calif., 1992)"

http://schema.org/name

"Materials modification by energetic atoms and ions symposium held April 28-30, 1992, San Francisco, California, USA"@en
"Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA"
"Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, USA"
"Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A"

http://schema.org/workExample

http://www.worldcat.org/oclc/840254515
http://www.worldcat.org/oclc/797943202
http://www.worldcat.org/oclc/246781835
http://www.worldcat.org/oclc/489885508
http://www.worldcat.org/oclc/26363830
http://www.worldcat.org/oclc/645865071

Materials Research Society (1992 ; San Francisco, Calif) (Symposium K)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Materials Research Society (1992 ; San Francisco, Calif) (Symposium K)"

http://experiment.worldcat.org/entity/work/data/28744343#Meeting/materials_research_society_1992_san_francisco_calif_symposium_k

Symposium K, "Materials Modifications by Energetic Atoms and Ions" (1992 : San Francisco, Calif.)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Symposium K, "Materials Modifications by Energetic Atoms and Ions" (1992 : San Francisco, Calif.)"

http://experiment.worldcat.org/entity/work/data/28744343#Meeting/symposium_k_materials_modifications_by_energetic_atoms_and_ions_1992_san_francisco_calif

San Francisco <Calif., 1992>

This is a placeholder reference for a Place entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Place
schema:name
"San Francisco <Calif., 1992>"

http://experiment.worldcat.org/entity/work/data/28744343#Place/san_francisco_&lt_calif_1992&gt

San Francisco (Calif., 1992)

rdf:type
http://schema.org/Place
schema:name
"San Francisco (Calif., 1992)"

http://experiment.worldcat.org/entity/work/data/28744343#Place/san_francisco_calif_1992

Ätzen.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Ätzen."