Linked Data Explorerhttp://worldcat.org/entity/work/id/365675765
Lasers in microlithography 2-3 March 1987, Santa Clara, California
Open All Close All
http://schema.org/about
- http://id.worldcat.org/fast/992842
- http://experiment.worldcat.org/entity/work/data/365675765#Topic/kongress
- http://experiment.worldcat.org/entity/work/data/365675765#Topic/laser
- http://experiment.worldcat.org/entity/work/data/365675765#Topic/fotolithografie_halbleitertechnologie
- http://id.loc.gov/authorities/subjects/sh85084858
- http://id.worldcat.org/fast/1019883
- http://id.loc.gov/authorities/subjects/sh2008106672
- http://id.loc.gov/authorities/subjects/sh85074788
- http://id.loc.gov/authorities/subjects/sh2008107753
- http://experiment.worldcat.org/entity/work/data/365675765#Topic/photolithographie_halbleitertechnologie
- http://id.worldcat.org/fast/992853
http://schema.org/genre
- "Santa Clara (Calif., 1987)"
- "Conference papers and proceedings"@en
- "Conference papers and proceedings"
- "Kongress"
http://schema.org/name
- "Lasers in microlithography : 2-3 March 1987, Santa Clara, California"
- "Lasers in microlithography : 2-3 march 1987, Santa Clara"
- "Lasers in microlithography 2-3 March 1987, Santa Clara, California"@en