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http://worldcat.org/entity/work/id/774337296

Journal of vacuum science & technology / B

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type

about

alternateName

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  • "Microelectronics and nanometer structures"
  • "Journal of vacuum science & technology / B"
  • "Journal of vacuum science and technology"
  • "Microelectronics processing and phenomena"

contributor

name

http://schema.org/name

  • "Journal of vacuum science & technology / B"
  • "Journal of vacuum science & technology : JVST ; the official journal of the AVS / B : an international journal devoted to microelectronics and nanometer structures ; processing, measurement and phenomena"
  • "Journal of vacuum science & technology. B : an international journal devoted to microelectronics and nanometer structures ; processing, measurement and phenomena : JVST ; the official journal of the AVS"

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